Implementation Issues on MEMS - A Study on System Identification

Description

A nonlinear identification scheme is provided for a LTI-system with a feedback-nonlinearity, which depends on the input and LTI-system output. This is especially the case for MEMS, where the electrostatic field depends on the displacement and input voltage. The fact, that the algorithm only requires a matrix inversion and singular value decomposition, makes it possible to use the identification scheme for online-estimation. There is also no other a-priori knowledge about the system, except the order, needed.

Links & Downloads

1. urn:nbn:de:swb:ch1-200501442
2. https://monarch.qucosa.de/id/qucosa%3A18393
3. https://monarch.qucosa.de/api/qucosa%3A18393/attachment/ATT-0/
4. https://monarch.qucosa.de/api/qucosa%3A18393/attachment/ATT-1/
5. https://monarch.qucosa.de/api/qucosa%3A18393/attachment/ATT-10/
6. https://monarch.qucosa.de/api/qucosa%3A18393/attachment/ATT-2/
7. https://monarch.qucosa.de/api/qucosa%3A18393/attachment/ATT-3/
8. https://monarch.qucosa.de/api/qucosa%3A18393/attachment/ATT-4/
9. https://monarch.qucosa.de/api/qucosa%3A18393/attachment/ATT-5/
10. https://monarch.qucosa.de/api/qucosa%3A18393/attachment/ATT-6/
11. https://monarch.qucosa.de/api/qucosa%3A18393/attachment/ATT-7/
12. https://monarch.qucosa.de/api/qucosa%3A18393/attachment/ATT-8/
13. https://monarch.qucosa.de/api/qucosa%3A18393/attachment/ATT-9/

Tags

info:eu-repo/classification/ddc/620

ddc:620

Identifikation

Kapazitiver Sensor

MEMS

Mikrospiegel

Nichtlinearität

Additional Fields

Identifer	oai:union.ndltd.org:DRESDEN/oai:qucosa:de:qucosa:18393
Date	28 October 2005
Creators	Wolfram, Heiko
Contributors	Specht, Hendrik, Schmiedel, Ralf, Aurich, Torsten, Dötzel, Wolfram
Publisher	Technische Universität Chemnitz
Source Sets	Hochschulschriftenserver (HSSS) der SLUB Dresden
Language	English
Detected Language	English
Type	doc-type:preprint, info:eu-repo/semantics/preprint, doc-type:Text
Rights	info:eu-repo/semantics/openAccess