Microbatteries are being considered as the critical components for portable and smart microelectronics, including remote sensors, micro-electromechanical systems, microrobots, implantable medical devices, and the Internet of Things, owing to their high energy densities, long life span, and facile on-chip integration. To date, tremendous efforts have been devoted to developing new methodologies for building high-performance microbatteries with minimum footprint areas. However, an effective and reliable fabrication procedure that is compatible with the modern microelectronics industry has not yet been reported for microbatteries so far. Two main issues need to be considered for the device design: (1) pursuing satisfying energy and power densities at limited footprint area is highly desired by constructing the 3D microelectrode architecture with high aspect ratio while reducing its footprint; (2) a novel technology is highly demanded to produce the 3D microstructure following an on-chip processing route which is compatible with the manufacturing procedure of microelectronic devices.
Rolled-up nanotechnology can transform a large-area planar precursor into a micrometer-sized Swiss-roll by careful strain-engineering and state-of-the-art micro-patterning techniques with a micro-origami self-assembly process, which reduces the device size for monolithic integration. This dissertation demonstrates brand-new 3D Swiss-roll microbatteries with high performance at a sub-square millimeter-scale by employing rolled-up nanotechnology. Two types of micro-batteries with different configurations have been designed and fabricated, including twin Swiss-roll and single Swiss-roll structures.
The twin Swiss-roll microbattery is fabricated based on two separated Swiss-roll micro-scaffolds with a parallel structure and controllable distance between them. The tuneable mesostructure benefits the mass loading of electroactive materials, rendering the excellent energy density at a greatly reduced footprint area. The twin Swiss-roll configuration is conducive to compatibility with novel battery chemistries due to its separated parallel Swiss-roll structure. In order to further decrease the overall footprint area, a single Swiss-roll configuration is designed for a fully integrated Swiss-roll microbattery. Micro-anode and micro-cathode are integrated into a single Swiss-roll configuration with an extremely small footprint area, which benefits the integration and miniaturization of microelectronics. Finally, an integrated device composed of a single Swiss-roll microbattery and UV photodetector is successfully fabricated within 1 mm2. The concept presented here enables the high-performance microbattery that can break through the limitation on microbattery’s footprint area, which opens up the new vision for the future on-chip microelectronics.:Table of contents
Chapter 1. Introduction 1
1.1. Background and motivation of this work 1
1.2. Dissertation structure 2
Chapter 2. Overview of 3D microbatteries 5
2.1. Electrochemical energy storage 5
2.2. Rechargeable zinc batteries 6
2.2.1. Alkaline rechargeable zinc batteries 7
2.2.2. Aqueous zinc ion batteries 8
2.2.3. Dual-ion hybrid zinc batteries 9
2.3. Configurations for 3D microbatteries 10
2.3.1. 3D sandwiched architecture 12
2.3.2. 3D interdigital architecture 13
2.3.3. Rolled-up microtubular architecture 15
2.4. Conclusion 17
Chapter 3. Overview of rolled-up technology 21
3.1. Self-rolled-up inorganic layers 21
3.2. Self-rolled-up polymeric shapeable platform 24
3.3. Applications of rolled-up nanomembranes for energy storage devices 26
3.3.1. Rolled-up active materials for LIBs 26
3.3.2. Rolled-up micro-platform for in-situ investigation 27
3.3.3. Rolled-up integratable 3D micro-capacitors/supercapacitors 29
Chapter 4. Experimental methods 35
4.1. Fabrication technologies 35
4.1.1. Photolithography 36
4.1.2. Electron beam evaporation 37
4.1.3. Magnetron sputtering deposition 38
4.1.4. Electrochemical deposition 39
4.2. Characterization methods 40
4.2.1. Scanning electron microscopy, focused ion beam milling, and energy dispersive spectrometry 40
4.2.2. X-ray diffraction 41
4.2.3. Raman spectroscopy 41
4.2.4. Electrochemical characterization 42
4.2.5. Finite element method simulations 43
Chapter 5. A twin Swiss-roll microbattery 45
5.1. Introduction 45
5.2. Fabrication and characterization of twin Swiss-roll microbattery 46
5.2.1. Reshape a 2D precursor to a 3D mesostructured Swiss-roll 46
5.2.2. The construction of Swiss-roll microelectrodes 48
5.3. Results and discussion 51
5.3.1. The encapsulation of twin Swiss-roll microbattery 51
5.3.2. Electrochemical performance of twin Swiss-roll microbattery 52
5.3.3. Practical applications of twin Swiss-roll microbattery 55
5.4. Conclusion 57
Chapter 6. A single Swiss-roll microbattery 59
6.1. Introduction 59
6.2. Fabrication of Swiss-roll Zn-Ag microbattery 60
6.2.1. Fabrication of micro-origami layer stack 61
6.2.2. Fabrication of battery components 63
6.2.3. Self-roll-up of single Swiss-roll microbattery 63
6.3. Results and discussion 65
6.3.1. Materials characterization 65
6.3.2. Electrolyte optimization 65
6.3.3. Electrochemical performance of single Swiss-roll microbattery 70
6.4. Conclusion 73
Chapter 7. Summary and outlook 75
7.1. Summary 75
7.2. Outlook 77
Bibliography 79
List of figures 87
List of tables 91
Versicherung 93
Acknowledgment 95
Publications and presentations 97
Curriculum vita 99
| Identifer | oai:union.ndltd.org:DRESDEN/oai:qucosa:de:qucosa:82630 |
| Date | 04 January 2023 |
| Creators | Li, Yang |
| Contributors | Schmidt, Oliver G., Weng, Qunhong, Kanoun, Olfa, Technische Universität Chemnitz |
| Source Sets | Hochschulschriftenserver (HSSS) der SLUB Dresden |
| Language | English |
| Detected Language | English |
| Type | info:eu-repo/semantics/publishedVersion, doc-type:doctoralThesis, info:eu-repo/semantics/doctoralThesis, doc-type:Text |
| Rights | info:eu-repo/semantics/openAccess |
| Relation | 10.1039/d2nh00472k, 10.1002/aenm.202103641, 10.1016/j.nanoms.2020.10.004, 10.1038/s41467-019-10947-x, 10.1016/j.nanoen.2019.05.059 |
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