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Modellierung und Realisierung eines integriert-optischen 1.31µm/1.55µm Wellenlängenmultiplexers in dotiertem Silikatglas auf Silizium - Modelling and Realization of an integrated-optic 1.31µm/1.55µm Wavelength Devision Multiplexer in doped silica on silicon

The realization of integrated-optic broadband wavelength devision multiplexer for separation of 1.31µm and 1.55µm wavelength window is demonstrated based on the well known arrayed waveguide structure. Broadband characteristic with passband greater than 100nm is achieved by using low diffraction order (m = 1, 2). The number of arrayed waveguides is W = 13 and W= 7 respectively. Structure parameters especially those for the star coupler region are derived by use of the transfer-matrix formalism for layered media and the wide-angle finite difference beam propagation method. Prototypes of these structures where realised as doped silica on silicon substrate by using standard plasma enhanced chemical vapor deposition (PECVD) and reactive ion etching (RIE) techniques. The waveguide structure is based on a 7x7µm waveguide core with refractive index difference Dn = 0.005 with reference to a 20µm buffer and cladding layer. Phosphor and Boron were used as dopands of each silica layer to achieve proper adjustment of phys ical layer properties, i.e. refractive index and transformation temperature. Codopand Boron is used to open a selective thermal postprocessing of deposited layers to overcome inhomogeneous PECVD cladding layer deposition on the RIE structured waveguide

Identiferoai:union.ndltd.org:DUETT/oai:DUETT:duett-04082002-145541
Date24 April 2002
CreatorsMichels, Rolf M.
ContributorsProf. Dr. rer.nat. Hilmar Franke, Prof. Dr. rer.nat. Wolfgang Kleemann
PublisherGerhard-Mercator-Universitaet Duisburg
Source SetsDissertations and other Documents of the Gerhard-Mercator-University Duisburg
LanguageGerman
Detected LanguageEnglish
Typetext
Formattext/html, application/pdf
Sourcehttp://www.ub.uni-duisburg.de/ETD-db/theses/available/duett-04082002-145541/
Rightsunrestricted, I hereby certify that, if appropriate, I have obtained and attached hereto a written permission statement from the owner(s) of each third party copyrighted matter to be included in my thesis, dissertation, or project report, allowing distribution as specified below. I certify that the version I submitted is the same as that approved by my advisory committee. Hiermit erteile ich der Universitaet Duisburg das nicht-ausschliessliche Recht unter den unten angegebenen Bedingungen, meine Dissertation, Staatsexamens- oder Diplomarbeit, meinen Forschungs- oder Projektbericht zu veroeffentlichen und zu archivieren. Ich behalte das Urheberrecht und das Recht das Dokument zu veroeffentlichen und in anderen Arbeiten weiterzuverwenden.

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