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A nano coordinate machine for optical dimensional metrology

No description available.
Identiferoai:union.ndltd.org:GATECH/oai:smartech.gatech.edu:1853/16525
Date05 1900
CreatorsKirkland, Eric Alan
PublisherGeorgia Institute of Technology
Source SetsGeorgia Tech Electronic Thesis and Dissertation Archive
Detected LanguageItalian
TypeThesis
RightsAccess restricted to authorized Georgia Tech users only.

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