Wafer handling robotics are critical in semiconductor manufacturing to enable tight control of temperature, humidity, and particle contamination during processing. Closed-loop dynamic modeling during the robot design process ensures designs meet throughput and stability specifications prior to prototype hardware purchase. Dynamic models are also used in model-based control to improve performance. This thesis describes the generation and mathematical verification of a dynamic model for a three degrees-of-freedom wafer handling mechanism with one linear and two rotary axes. The dynamic plant model is integrated with motion and motor controller models, and the closed-loop performance is compared with experimental data. Models with rigid and flexible connections are compared, and the flexible connection models are shown to overall agree better with a measured step response. The simulation time increase from the addition of flexible connections can be minimized by modeling only the component stiffnesses that impact the closed-loop mechanism response. A method for selecting which elements to include based on controller bandwidth is presented and shown to significantly improve simulation times with minimal impact on model predictive performance.
| Identifer | oai:union.ndltd.org:GATECH/oai:smartech.gatech.edu:1853/54313 |
| Date | 07 January 2016 |
| Creators | Babayan, Elaina Noelle |
| Contributors | Lipkin, Harvey |
| Publisher | Georgia Institute of Technology |
| Source Sets | Georgia Tech Electronic Thesis and Dissertation Archive |
| Language | en_US |
| Detected Language | English |
| Type | Thesis |
| Format | application/pdf |
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