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MANUFACTURING PROCESS OF NANOFLUIDICS USING AFM PROBE

Indiana University-Purdue University Indianapolis (IUPUI) / A new process for fabricating a nano
fluidic device that can be used in medical
application is developed and demonstrated. Nano channels are fabricated using a
nano tip in indentation mode on AFM (Atomic Force Microscopy). The nano channels
are integrated between the micro channels and act as a filter to separate biomolecules.
Nano channels of 4 to7 m in length, 80nm in width, and at varying depths from 100nm
to 850 nm allow the resulting device to separate selected groups of lysosomes and
other viruses. Sharply developed vertical micro channels are produced from a deep
reaction ion etching followed by deposition of different materials, such as gold and
polymers, on the top surface, allowing the study of alternative ways of manufacturing
a nano fluidic device. PDMS (Polydimethylsiloxane) bonding is performed to close
the top surface of the device. An experimental setup is used to test and validate the
device by pouring fluid through the channels. A detailed cost evaluation is conducted
to compare the economical merits of the proposed process. It is shown that there is
a 47:7% manufacturing time savings and a 60:6% manufacturing cost savings.

Identiferoai:union.ndltd.org:IUPUI/oai:scholarworks.iupui.edu:1805/7917
Date05 1900
CreatorsKaringula, Varun Kumar
ContributorsHAZIM, EL-MOUNAYRI, ZHU, LIKUN, DECCA, RICARDO S.
Source SetsIndiana University-Purdue University Indianapolis
LanguageEnglish
Detected LanguageEnglish
TypeThesis
RightsCC0 1.0 Universal, http://creativecommons.org/publicdomain/zero/1.0/

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