This thesis presents a method for dynamic characterization of MEMS structures
and discuses parameters that affect its measurements and techniques to improve them.
Current methods of non-contact, laser based vibration measurement require special and
expensive instruments. The method used in this thesis on the other hand, relies on Fast
Fourier Transform analysis of blurred images captured using conventional cameras.
The Fourier series analysis and transformation are introduced. Basic concepts of
blur image analysis and associated technical terms are described. Step by step data
extraction process for Fourier analysis of blurred images and results such as amplitude,
attenuation, signal to noise ratio and Bessel curve are explained.
Macro and micro scale experiments are designed and used to determine the effect
and significance of different parameters on signal-to-noise ratio of extracted results. For
this purpose geometrical parameters of macro scale combs such as length, width and duty
cycle are varied across a considerable range and tests results are examined.
In addition to the experiments, MATLAB code is used to model environmental
effects such as addition of noise or changes of brightness. In micro scale experiments,
extra patterns are created using Focused Ion Beam and etching process. Test and
comparison of modified micro structures with unpatterned structures show improvement
in signal to noise ratio especially in environments with high level of noise.
| Identifer | oai:union.ndltd.org:LACETR/oai:collectionscanada.gc.ca:NSHD.ca#10222/15022 |
| Date | 14 June 2012 |
| Creators | Mottaghi, Mehrdad |
| Source Sets | Library and Archives Canada ETDs Repository / Centre d'archives des thèses électroniques de Bibliothèque et Archives Canada |
| Language | English |
| Detected Language | English |
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