This thesis, for the first time in the literature, presents the effect of quadrature error compensation on the performance of a fully decoupled MEMS gyroscope and provides experimental data on the sources of quadrature error. Dedicated quadrature error cancellation electrodes operating with only differential DC potentials are designed. Gyroscopes with intentionally placed imperfections are fabricated with SOG based SOI process which provides higher yield and uniformity compared to SOG process. Tests show that the fully closed loop system with quadrature cancellation operates as expected. Gyroscope performance is improved up to 7.8 times for bias instability, 10 times for angle random walk (ARW) and 800 times for output offset with quadrature cancellation. The actual improvement is higher since some sensors cannot be operated without quadrature cancellation and they are not included in improvement calculations. The best obtained performance is bias instability of 0.39
| Identifer | oai:union.ndltd.org:METU/oai:etd.lib.metu.edu.tr:http://etd.lib.metu.edu.tr/upload/12612436/index.pdf |
| Date | 01 October 2010 |
| Creators | Tatar, Erdinc |
| Contributors | Akin, Tayfun |
| Publisher | METU |
| Source Sets | Middle East Technical Univ. |
| Language | English |
| Detected Language | English |
| Type | M.S. Thesis |
| Format | text/pdf |
| Rights | To liberate the content for public access |
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