<p>The purpose of the research presented herein has been to determine the underlyingmechanisms of and to optimize the growth parameters for the growth of smooth surfaceson InGaN and GaN thin films via metalorganic vapor phase epitaxy. Relationshipsamong dislocation density, film thickness, flow rates of the reactants, kinetic growthregime, and thermodynamic growth mode with the surface morphology and surfaceroughness were determined. The two chief parameters affecting template surface roughness in both growth ofGaN above 1000ºC were determined to be temperature and layer thickness. An optimumtemperature of 1020ºC was found for the former process, below which the islands formedin the growth on AlN buffer layers did not coalesce properly, and above which a hillockgrowth instability was pervasive on the surface. Increasing the GaN film depositiontemperature to 1100°C for GaN film deposition via PE enhanced sidewall growth;however, surface roughness was increased on the (0001) growth plane through theformation of hillocks. Template thickness above 2.5 microns had the lowest root mean squaresurface roughness of 0.48nm over 100 square microns. This was attributed to reductions indislocation density, as measured by corresponding 50% reductions in symmetric andasymmetric full width half maximum values of X-ray rocking curves. GaN films were grown at 780ºC to remove the influence of indium incorporationon the surface roughness. V-defects covered the surface at a density of 2E9 per square centimeter andwere linked with a boundary dragging effect. Growth parameters that affect Inincorporation into the InGaN films were investigated and measured using roomtemperature photoluminescence, x-ray diffraction, and x-ray photoelectron spectroscopy.Temperature and growth rate had the greatest effect on incorporation over the range of760 to 820ºC and 25 and 180nm/hr, respectively, through kinetically limiting InNdecomposition. Additions of In into the GaN film produced hillock islands that wereattributed to a strain relief mechanism. The V-defects were also observed in InGaN films;however, their formation was suppressed below a nominal thickness of 25nm<P>
| Identifer | oai:union.ndltd.org:NCSU/oai:NCSU:etd-20010712-094012 |
| Date | 13 July 2001 |
| Creators | Miraglia, Peter Quinn |
| Contributors | Robert F. Davis, Robert J. Nemanich, Salah M. Bedair, Mohamad M. Bourham |
| Publisher | NCSU |
| Source Sets | North Carolina State University |
| Language | English |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://www.lib.ncsu.edu/theses/available/etd-20010712-094012 |
| Rights | unrestricted, I hereby certify that, if appropriate, I have obtained and attached hereto a written permission statement from the owner(s) of each third party copyrighted matter to be included in my thesis, dissertation, or project report, allowing distribution as specified below. I certify that the version I submitted is the same as that approved by my advisory committee. I hereby grant to NC State University or its agents the non-exclusive license to archive and make accessible, under the conditions specified below, my thesis, dissertation, or project report in whole or in part in all forms of media, now or hereafter known. I retain all other ownership rights to the copyright of the thesis, dissertation or project report. I also retain the right to use in future works (such as articles or books) all or part of this thesis, dissertation, or project report. |
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