In this paper, a single mode buried polymer waveguide on silicon dioxide layer on silicon substrate is presented. The waveguide was completed by first obtaining the optical field distribution using a beam propagation method. The waveguide structure is carefully designed to ensure a single-mode operation of this device. The waveguide was fabricated by first etching a trench on SiO2 layer. Then Benezocy-clobutene (BCB) polymer was deposited onto the layer and cured in proper conditions. Finally, a thin hybrid sol-gel layer was used as the top cladding layer after the BCB polymer etch-back process. The propagation losses are 0.91dB/cm and 0.97dB/cm for TE and TM polarized lights. The polarization dependent loss is 0.06dB/cm. The coupling loss of the waveguide is 1.78dB.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0625103-180250 |
| Date | 25 June 2003 |
| Creators | Wu, Ming-jen |
| Contributors | Wen-Chang Ho, An-Kuo Chu, Ju-Ta Tun, Ken-Huang Lin |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0625103-180250 |
| Rights | unrestricted, Copyright information available at source archive |
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