The goal of the thesis is to fabricate the integrated asymmetric Mach-Zehnder Interferometer and Optical waveguide Ring Resonator with simple fabrication process. A 1.49£gm symmetric quantum well InGaAlAs epitaxial wafer is used to fabricate the devices.
In the asymmetric Mach-Zehnder Interferometer design, we design asymmetric straight waveguides with difference of optical path, and asymmetric bend waveguides with difference of curvature radius. By this design, we can observe the interference variation of output light by
difference of optical path. Using these properties, it will get the index change caused by electric field and the loss of bend waveguide.
In optical waveguide ring resonator design, we improve the problem of the length of original K=0.15 Multi-Mode Interference (MMI) by stepped-width waveguide. And we obtain different transmission spectrum by adjusting the splitting ratio of MMI couplers (K=0.85, 0.5, and 0.15)
and cascading doudle rings. We apply K0=0.5, K1=0.15 and K2=0.5 MMIs to design and fabricate optical filters with square transmission spectrum.
In fabrication process, we get smooth sidewall and highly
perpendicularity waveguide by multi-step wet etch method. In order to reduce waveguide loss, we make deep etching for the outside of curve waveguide and MMI. Finally, we use polyimide to smooth out the sides of the ridge waveguides and evaporate metal pad over the polyimide.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0710106-221145 |
| Date | 10 July 2006 |
| Creators | Li, Kuan-Jui |
| Contributors | Kuo-Jui Lin, Lung-Han Peng, Shoou-Jinn Chang, Tsong-Sheng Lay, Tao-Yuan Chang |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0710106-221145 |
| Rights | not_available, Copyright information available at source archive |
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