In this thesis, we have set up a SiO2 sputter system. We applied sputter techniques for quantum well intermixing (QWI) process to increase the bandgap of the quantum well structure.
The samples with multiple quantum wells were grown by our team members using molecular beam epitaxy system, and the MQW structure were grown by MOCVD. Before sputtering, some samples will use ICP to enhance the vacancy on the surface. First, we will sputter SiO2 on the surface of sample. After SiO2 film deposition, the samples were annealed by Rapid Thermal Process. And ordinary annealing were about 700¢J~800¢J. A later period, the annealing temperatures will be above 850¢J. Room-temperature PL (Photoluminescence) measurements were used to study the blue shift and intensity change after QWI process. And we will do the mesa process to measure the characteristic of optoelectronics.
If the conditions are RF power = 100W, sputter time = 30 min, ICP enhance 250W for 2 min, annealing temperature = 825¢J, annealing time = 60 sec. The PL signal have a blue shift of 64nm(wavelength from 1506nm to 1444nm).When annealing temperature =700¢J, and annealing time = 60 sec, we have a blue shift of 12nm(wavelength from 1572nm to 1560nm) on the C116 sample.
We do the mesa process on the MQW which contain P and it have a large blue shift. After the process, we success to compare the different between EL and Photocurrent. But the structure of samples which certain Al do not have a apparent blue shift. And the annealing temperature is too large, samples will be damaged. We think that the reason have relation to materials of the sample.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0711106-161509 |
| Date | 11 July 2006 |
| Creators | Juang, Young-ran |
| Contributors | Tzong-Yow Tsai, Wen-Jeng Ho, Wood-Hi Cheng, Tao-Yuan Chang, Tsong-Sheng Lay |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0711106-161509 |
| Rights | not_available, Copyright information available at source archive |
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