In this study, the mechanical properties of nanocrystalline Mo and Zr thin films are examined. The specimens of nanocrystalline Mo and Zr thin films were all fabricated by DC magnetron sputtering at various temperatures. These specimens were annealed in RTA system and then investigated by X-ray diffractormeter as well as TEM. After that, nanocrystalline Mo and Zr thin films were tested by nanoindentation. The average grain sizes in Zr thin films annealed are larger than deposited at high temperature, but the films after annealing are stripped away from the substrates due to the thermal shock. The average grain sizes estimated by XRD patterns are in common with those estimated by TEM images. We suggest that the difference is deviation. Nanocrystalline Mo thin films were first tested by both nanoindentation and tensile tests. Mo thin films were stripped away during tensile tests. We consider that the phenomenon is due to the honeycombed structure of the films. The X-ray diffraction patterns and TEM observations indicated that there is no evident grain growth in the nanocrystalline Zr thin films, deposited at 100 ¢XC, 200 ¢XC, and 300 ¢XC, except at 400 ¢XC. The deposition temperature for apparent grain growth in the Zr thin films is at least above 300 ¢XC. After nanoindentation tests, the hardness (H) and Young¡¦s modulus (E) of specimens deposited at 400 ¢XC are higher than that of other specimens. Compared to coarse-grained Zr metals, we suggest that the slope k in the Hall-Petch relationship is quite small and in the range of nanocrystalline Zr thin films.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0727110-180139 |
| Date | 27 July 2010 |
| Creators | Wang, Yi-Jen |
| Contributors | Hsieh Ker-Chang, Huang Chih-Ching, Kao Po-We |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | English |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0727110-180139 |
| Rights | off_campus_withheld, Copyright information available at source archive |
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