In the thesis, we fabricated the quantum dots lasers of 2D photonic crystal microcavity structures by E-beam lithography. The Al0.5Ga0.5As sacrificing layer beneath the Dwells structure is used for the purpose of suspending the active layer by air. Therefore, it has a high refractive index contrast in vertical direction to confine energy. Finally, we could fabricate a low threshold current photonic crystal laser.
We can judge the epitaxy quality by the Microdisk (MD) process before the photonic crystal device process. For the 2D photonic crystal microcavity, we design different kinds of window to support the photonic crystal membrane cavity. We use dry and wet etching technique and metal mask to fabricate MD and photonic crystal membrane cavity. We use £g-PL to measure MD cavity resonant mode for the device of diameter 3£gm at room temperature. In addition, we design three kinds of defects (L3, H2, H3) of photonic crystal membrane structures using the sample C488. We measure resonant mode with H3 structure. The H3 structure measured resonant wavelength 1.26£gm, with Q =503.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0728110-174052 |
| Date | 28 July 2010 |
| Creators | Huang, Shr-Chiuan |
| Contributors | Tsong-Sheng Lay, Chin-Ping Yu, Yi-Jen Chiu, Chien-Chung Lin, Jian- Jang Huang |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0728110-174052 |
| Rights | not_available, Copyright information available at source archive |
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