The purpose of this thesis is to design and fabricate vertical mirror reflector. We fabricated semiconductor laser and optical filter by vertical mirror reflector and bended waveguide. By this design, we could bend the incident optical mode and get the power splitter with coupling coefficient is 0, 0.15 and 0.5. In order to make total internal reflection in vertical reflective mirror, we used ICP-RIE dry etching process to fabricate vertical and smooth mirror. By BPM simulation, we showed that the device volume was decreased to 50%.
In the semiconductor laser, we fabricated the Fabry-Perot laser by optical waveguide reflector with one input and two inputs. In addition, we also fabricated a reformatory Fabry-Perot laser by the ring resonator with one 3dB coupler, two 90o angle reflectors, and bended waveguide.
In the semiconductor optical filter, we design 2¡Ñ2 90o angle reflector whose coupling coefficient is 0.15, and ring resonator with two 2¡Ñ2 90o reflector and bended waveguide.
In fabrication process, first, we defined the device pattern by using photo-lithography technique. Second, we etched ridge waveguide by using dry etching and wet etching method. In order to decrease the scattering loss, we deep etched bended waveguide and the reflector. Then, we etched the reflector mirror by ICP-RIE dry etching process. Finally, we used polyimide to flatten the sides of the ridge waveguide and evaporated metal electrode.
In the device characteristic, we obtained a power splitter with 65 percent and 35 percent output. It demonstrates that the light was reflected from reflective mirror to output port.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0730107-175726 |
| Date | 30 July 2007 |
| Creators | Tseng, Wen-Hsin |
| Contributors | Wood-Hi Cheng, Kuo-Jui Lin, Fow-Sen Choa, Tsong-Sheng Lay, Yi-Jen Chiu |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0730107-175726 |
| Rights | not_available, Copyright information available at source archive |
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