A low-temperature method, supercritical CO2 fluid (SCCF) technology, was applied for oxidation of metal Zn film on glass substrate at 60¢XC. In this study, Zn film was deposited by DC sputtering at room temperature and post-treated by SCCF, which is mixed with 0.15 vol % H2O. The scanning electron microscopy (SEM) images and transmission electron microscopic (TEM) indicate that high density ZnO Nanotubes were formed on the glass substrate. SCCF technology has shown successful oxidation the Zinc at low temperature for the first time.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0831109-113132 |
| Date | 31 August 2009 |
| Creators | Chang, Kuan-chang |
| Contributors | Tzung-Ming Tsai, Jian-Shiang Jau, Tai-Fa Yang, De-Shin Gan |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0831109-113132 |
| Rights | withheld, Copyright information available at source archive |
Page generated in 0.0019 seconds