This paper aims to design and simulate the surface-micromachining micro tunable capacitor for parameters optimization. This work also creates an equivalent circuit model of micro tunable capacitor and proceeds relative electromechanical analysis, including the distribution of field and charge, resonant frequency and pull-in voltage analysis. This micro tunable capacitor is constructed by one suspended top metal plate and two stationary bottom metal plates (one is signal electrode and the other one is bias electrode). By driving electrostatic force, the gap between top and bottom electrodes will be changed and results in a variation of capacitance. To increase the tuning range, the micro tunable capacitor with two different gap space will be presented in this research.
High frequency analysis, equivalent circuit analysis and electromechanical dynamic analysis are using Ansoft HFSS, Agilent ADS and the IntelliSuite software respectively. Through these simulation and analysis, it is possible to obtain the optimized specification of micro tunable capacitor. The quality factor (Q) and the pull-in voltage extracted by simulation software well match to the measured results; thus, the function of the analysis method and equivalent model adopted in this thesis can be demonstrated.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0912107-194543 |
| Date | 12 September 2007 |
| Creators | Chou, Che-Ya |
| Contributors | Jin-Chern Chiou, I-Yu Huang, Shiang-Hwua Yu, Yu-Cheng Lin |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0912107-194543 |
| Rights | not_available, Copyright information available at source archive |
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