Metal organic chemical vapor deposition and atomic layer deposition of strontium oxide films on silicon surfaces

Description

Thesis (M.Ch.E.)--University of Delaware, 2007. / Principal faculty advisor: Brian G. Willis, Dept. of Chemical Engineering. Includes bibliographical references.

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1. http://gateway.proquest.com/openurl?url_ver=Z39.88-2004&res_dat=xri:pqdiss&rft_val_fmt=info:ofi/fmt:kev:mtx:dissertation&rft_dat=xri:pqdiss:1440589

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Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/123439631
Date	January 2007
Creators	Cuadra, Amalia C.
Source Sets	OCLC
Language	English
Detected Language	English
Source	Access to citation, abstract and download form provided by ProQuest Information and Learning Company; downloadable PDF file, 164 p.