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Characterisation and optimisation of the variable frequency microwave technique and its application to microfabrication

Thesis (PhD) - Swinburne University of Technology, Industrial Research Institute Swinburne - 2006. / A thesis submitted to the Industrial Research Institute Swinburne, Swinburne University of Technology in fulfillment of the requirements for the degree of Doctor of Philosophy - 2006. Typescript. Includes bibliographical references (p. 183-193).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/225459023
Date January 2006
CreatorsAntonio, Christian.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceAustralian Digital Thesis Program

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