Thesis (M.S.)--Worcester Polytechnic Institute. / Keywords: MEMS characterization; stroboscopic illumination; interferometry; phase modulation. Includes bibliographical references (leaves 97-104).
| Identifer | oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/227788573 |
| Date | January 2007 |
| Creators | Rodgers, Matthew T. |
| Publisher | Worcester, Mass. : Worcester Polytechnic Institute, |
| Source Sets | OCLC |
| Language | English |
| Detected Language | English |
| Source | Link to electronic thesis |
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