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Investigation of an in-situ method for determining the modulation transfer function and its applications in a microlithographic wafer stepper /

Thesis (M.S.)--Rochester Institute of Technology, 1990. / Spine title: In-situ method for determining modulation transfer. Includes bibliographical references (leaves 56-60.).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/24558474
Date January 1990
CreatorsCarlson, Steven D.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceOnline version of thesis

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