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In situ sensing for chemical vapor deposition based on state estimation theory

Thesis (Ph. D.)--Chemical and Biomolecular Engineering, Georgia Institute of Technology, 2008. / Committee Chair: Gallivan, Martha; Committee Member: Ferguson, Ian; Committee Member: Henderson, Cliff; Committee Member: Hess, Dennis; Committee Member: Lee, Jay.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/268956930
Date January 2007
CreatorsXiong, Rentian.
PublisherAtlanta, Ga. : Georgia Institute of Technology,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceAvailable online, Georgia Institute of Technology:

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