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Optimization of resolution enhancement techniques in optical lithography

Thesis (Ph.D.)--University of Delaware, 2009. / Principal faculty advisor: Gonzalo Arce, Dept. of Electrical & Computer Engineering. Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/496111202
Date January 2009
CreatorsMa, Xu.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceAccess to citation, abstract and download form provided by ProQuest Information and Learning Company; downloadable PDF file, 252 p.

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