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Integrated through-wafer optical monitoring of MEMS for closed-loop control

Thesis (Ph. D.)--West Virginia University, 2002. / Title from document title page. Document formatted into pages; contains xiv, 180 p. : ill. (some col.). Includes abstract. Includes bibliographical references (p. 177-180).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/49883745
Date January 2002
CreatorsDawson, Jeremy M.
PublisherMorgantown, W. Va. : [West Virginia University Libraries],
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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