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Thermomechanical stress studies for advanced copper metallization and integration

Thesis (Ph. D.)--University of Texas at Austin, 2001. / Vita. Includes bibliographical references. Available also from UMI/Dissertation Abstracts International.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/50171792
Date January 2001
CreatorsDu, Yong.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceAccess restricted to users with UT Austin EID Full text (PDF) UMI/Dissertation Abstracts International

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