Simultaneous control and identification for multiple product and process environments in semiconductor manufacturing

Description

Thesis (Ph. D.)--University of Texas at Austin, 2001. / Vita. Includes bibliographical references. Available also from UMI/Dissertation Abstracts International.

Links & Downloads

1. http://www.lib.utexas.edu/etd/r/d/2001/p26/pasadyna019.pdf#page=3
2. http://wwwlib.umi.com/cr/utexas/fullcit?p3040636

Tags

Semiconductors. Control theory.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/50547532
Date	January 2001
Creators	Pasadyn, Alexander James,
Source Sets	OCLC
Language	English
Detected Language	English