Simultaneous control and identification for multiple product and process environments in semiconductor manufacturing /

Description

Thesis (Ph. D.)--University of Texas at Austin, 2001. / Vita. Includes bibliographical references (leaves 163-171). Available also in a digital version from Dissertation Abstracts.

Links & Downloads

1. http://wwwlib.umi.com/cr/utexas/fullcit?p3040636

Tags

Semiconductors. Control theory.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/53711424
Date	January 2001
Creators	Pasadyn, Alexander James,
Source Sets	OCLC
Language	English
Detected Language	English
Source	Full text (PDF) from UMI/Dissertation Abstracts International