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Thin film resistance to hydrofluoric acid etch with applications in monolithic microelectronic/MEMS integration

Thesis (Ph. D.)--School of Electrical and Computer Engineering, Georgia Institute of Technology, 2004. Directed by James Meindl. / Includes bibliographical references (leaves 58-60).
Date January 2003
CreatorsMcKenzie, Todd G.,
Source SetsOCLC
Detected LanguageEnglish
SourceAvailable online, Georgia Institute of Technology, 2004:

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