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The stability and performance of the EWMA and double-EWMA run-to-run controllers with metrology delay

Thesis (Ph. D.)--University of Texas at Austin, 2004. / Supervisor: S. Joe Qin. Vita. Includes bibliographical references. Also available from UMI.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/57551134
Date January 2004
CreatorsGood, Richard Paul, Qin, S. Joe,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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