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Mechanics of the pad-abrasive-wafer contact in chemical mechanical polishing a dissertation /

Title from title page (viewed April 28, 2010) Graduate School of Engineering. Dept. of Mechanical and Industrial Engineering. Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/609852453
Date January 1900
CreatorsBozkaya, Dinçer,
Publisher[Boston, Mass. : Northeastern University,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
TypeElectronic dissertations.
SourceView dissertation online

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