Design and synthesis of materials for 157 nm photoresists applications

Description

Thesis (Ph. D.)--University of Texas at Austin, 2005. / Vita. Includes bibliographical references.

Links & Downloads

1. http://repositories.lib.utexas.edu/bitstream/handle/2152/1689/pinnowm70635.pdf

Tags

Photoresists Photolithography.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/61707908
Date	January 2005
Creators	Pinnow, Matthew James.
Source Sets	OCLC
Language	English
Detected Language	English