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Design and synthesis of materials for 157 nm photoresists applications

Thesis (Ph. D.)--University of Texas at Austin, 2005. / Vita. Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/61707908
Date January 2005
CreatorsPinnow, Matthew James.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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