On the mechanisms of hydrogen implantation induced silicon surface layer cleavage

Description

Marburg, Univ., Diss., 2001.

Links & Downloads

1. http://archiv.ub.uni-marburg.de/diss/z2002/0403/pdf/dth.pdf
2. http://archiv.ub.uni-marburg.de/diss/z2002/0403
3. http://deposit.ddb.de/cgi-bin/dokserv?idn=972797750

Tags

Silicium

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/637429556
Date	January 2001
Creators	Höchbauer, Tobias.
Publisher	[S.l.] : [s.n.],
Source Sets	OCLC
Language	Undetermined
Detected Language	English