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Modelling and inverse modelling of scanning capacitance microscopy for dopant profile extraction /

Thesis (Ph.D.) - University of Queensland, 2006. / Includes bibliography.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/69676840
Date January 2005
CreatorsHong, Yang David.
Publisher[St. Lucia, Qld.],
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceModelling and inverse modelling of scanning capacitance microscopy for dopant profile extraction</a><br>Read the abstract of the thesis.

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