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Mixed surfactant systems to control dispersion stability in severe environments for enhancing chemical mechanical polishing (CMP) of metal surfaces

Thesis (Ph. D.)--University of Florida, 2000. / Title from first page of PDF file. Document formatted into pages; contains xvii, 174 p.; also contains graphics. Vita. Includes bibliographical references (p. 165-173).
Date January 2000
CreatorsPalla, Byron Joseph,
Publisher[Florida] : State University System of Florida,
Source SetsOCLC
Detected LanguageEnglish

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