Nanolithography on thin films using heated atomic force microscope cantilevers

Thesis (M. S.)--Mechanical Engineering, Georgia Institute of Technology, 2007. / King, William Paul, Committee Chair ; Henderson, Clifford L, Committee Co-Chair ; Gall, Ken, Committee Member.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/80017856
Date January 2006
CreatorsSaxena, Shubham.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceAvailable online, Georgia Institute of Technology, 2006.

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