Thesis (M.S.)--Worcester Polytechnic Institute. / Keywords: vacuum; shape and deformation measurement; MEMS; vibrometry; scanning white light; Interferometry; thermal; vibration. Includes bibliographical references (136-139 leaves ).
| Identifer | oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/86083611 |
| Date | January 2007 |
| Creators | Klempner, Adam R. |
| Source Sets | OCLC |
| Language | English |
| Detected Language | English |
| Source | Link to electronic thesis |
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