Kinetic study on the synthesis of Si���N��� via the ammonization of SiO vapor

Description

Graduation date: 1996

Links & Downloads

1. http://hdl.handle.net/1957/34606

Tags

Silicon nitride -- Synthesis

Silicon oxide

Additional Fields

Identifer	oai:union.ndltd.org:ORGSU/oai:ir.library.oregonstate.edu:1957/34606
Date	08 November 1995
Creators	Lin, Dah-cheng
Contributors	Kimura, Shoichi
Source Sets	Oregon State University
Language	en_US
Detected Language	English
Type	Thesis/Dissertation