<p> We studied the temperature transient behavior of an airpit-insulated micro hotplate (µHP) and aerogel-insulated µHP with different airpit heights and aerogel thicknesses. The µHP insulated by 1.3µm-thick aerogel consumes 26.7mW of power at 82°C with a time constant of 114.5 µsec, while the µHP insulated by 4?µm-thick aerogel consumes 35.6mW of power to provide 220°C with a time constant of 211.6 µsec. At the same time, a 100 µm-deep airpit-insulated ?HP consumes 18mW of power to reach approximately 400°C. The time constant of aerogel does not depend just on material properties but also on the structural design of the micro-heater. The temperature transient response time of µHPs is continued to improve from using air-pited, recessed silica aerogel, to thick-film silica aerogel.</p>
| Identifer | oai:union.ndltd.org:PROQUEST/oai:pqdtoai.proquest.com:10002455 |
| Date | 28 January 2016 |
| Creators | Edpuganti, Koutilya |
| Publisher | University of Louisiana at Lafayette |
| Source Sets | ProQuest.com |
| Language | English |
| Detected Language | English |
| Type | thesis |
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