Material logistic system for fully automated semiconductor manufacturing factory / 全自動化半導體廠之物料後勤支援系統設計與實現

碩士 / 國立臺灣科技大學 / 工程技術研究所 / 84 / Material Logistic System (MLS) coordinates material movement
among various components of automatic material handling system
(AMHS), stockers and AGV for instance, to meet production
planning in a computer integrated manufacturing (CIM) system.
The main functional requirement of an MLS consists of: (1) work-
in-process (WIP) tracking;(2) material transportation route
decision;(3) transportation vehicle drivers for AMHS; and (4)
Graphic user interface for inventory query and material
dispatching.This thesis adopts Object Oriented Modeling
Technique (OMT) in developing an MLS for a fully automated
semiconductor manufacturing fab, where material transportation
is divided into: intrabay movement between stocker and
equipment through AGV in a tunnel, and interbay movement
between stockers of different tunnels. In the proposed MLS
framework, intrabay movement is designated to a local MLS,
whereas interbay movement is made possible through
collaboration of peer local MLS''s. Derivation of the three OMT
models: object, dynamic and functional models, as well as the
implementation of the proposed distributed control framework
are examined in detail.

Identiferoai:union.ndltd.org:TW/084NTUST027022
Date January 1996
CreatorsChen Jin Feng, 陳金豐
ContributorsChung Sheng Luen, 鍾聖倫
Source SetsNational Digital Library of Theses and Dissertations in Taiwan
Languagezh-TW
Detected LanguageEnglish
Type學位論文 ; thesis
Format129

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