碩士 / 國立交通大學 / 機械工程系 / 91 / The requirement of high quality clean environmet in many aspects of important sciences and technology has rapidly gained momentum in the last ten years. Meanwhile, energy problems had also become worldwide profound issues. Therefore, the issues about how to promote cleanliness and retrench energy are important. The objective of this research is to study airflow characteristics in class 10 FFU clean room by both experiment measurement and numerical calculation. The STAR-CD commercial CFD software had been adopted for the numerical calculation. First, airflow characteristics in clean room are identified by investigated different grating floor open ratios, areas near the bench and inlet velocity of the side FFUs. Second, we try to proof CFD fits the results of measuring airflow in an empty pilot scale clean room. The measurements of the three components of air velocity were conducted by means of a three dimensional ultrasonic anemometer. The results show that the grating floor open ratio near bench in 30 cm and the area of 50% grating floor open ratio can’t improve the airflow turbulent intensity near the bench. Besides, a very good fit between data of measurements and outcome of simulation was found. It is envisaged that the results of the numerical simulation is a useful device for the design of full scale clean room.
| Identifer | oai:union.ndltd.org:TW/091NCTU0489023 |
| Date | January 2003 |
| Creators | Fu-Chia Huang, 黃富加 |
| Contributors | 曲新生 |
| Source Sets | National Digital Library of Theses and Dissertations in Taiwan |
| Language | zh-TW |
| Detected Language | English |
| Type | 學位論文 ; thesis |
| Format | 149 |
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