碩士 / 龍華科技大學 / 電子系碩士班 / 94 / In this thesis, it is a research to explore and to construct a Micro Electronic Mechanical System (MEMS) Accelerometers designing and Applications. Firstly, it introduce operation principle and basic theorem for accelerometers, then generalize the product procedure of MEMS accelerometer for its functions and its specs. It uses the six-accelerometer configuration to develope and produces a gyroscopic free MEMS inertial system. The thesis has two important research points, the first one , it propose a work of this research utilization the Six-accelerometer configuration to mechanize the hardware of MEMS accelerometer, and to produce a calibration method for the directional error and positional error for six accelerometer mechanization. The second one, after a design process, it manufactures a set of MEMS gyroscopic free INS. The MEMS six accelerometer mechanization can be used in a practical navigation purpose. State of the art for this technique can be developed sophisticated in the field such as biosensor, biomedicine, that is also an important research purposes of this thesis.
Identifer | oai:union.ndltd.org:TW/094LHU00428001 |
Date | January 2006 |
Creators | KUO-YU PENG, 彭國祐 |
Contributors | Sou-Chen Lee, 李守誠 |
Source Sets | National Digital Library of Theses and Dissertations in Taiwan |
Language | zh-TW |
Detected Language | English |
Type | 學位論文 ; thesis |
Format | 69 |
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