Characteristics Testing on a Underwater Piezoresistive MEMS sensor and its application / 水下壓阻式微感測器特性測試及應用

碩士 / 國立成功大學 / 系統及船舶機電工程學系碩博士班 / 94 / This study focus on establishing the standard characteristics testing on MEMS sensor. Also the application and promotion for underwater acoustic MEMS sensor are our goal. These testing sensors are piezoresistive sensors which fabricated by MEMS process. Comparing with the commercial hydrophone B&K 8104, MEMS sensors have better sensitivity.
 We build an auto sweep frequency program for users. To set the initial frequency, interval frequency and end frequency coefficients, the program can automatically generate the user-defined swept frequencies. By changing the acoustic frequency, if the acoustic frequency equal to the structure’s natural frequency, the resonance induce high signal-to-noise ratio. The specific frequency could be the sensor’s working frequency in water. According to the auto sweep frequency program, sensor’s frequency response and working frequency can be quickly determined.
 We also apply the MEMS sensor as the receiver element in underwater communication. The B&K 8104 is used to be a projector to generate the codes. In 60cm transmitting distance , our experiment results in 132bps transmitting speed and 8% bit error ratio. The result can be the foundation of MEMS sensor applications.

Identiferoai:union.ndltd.org:TW/094NCKU5345045
Date January 2006
CreatorsShi-Zheng Lin, 林世政
ContributorsRu-Min Chao, 趙儒民
Source SetsNational Digital Library of Theses and Dissertations in Taiwan
Languagezh-TW
Detected LanguageEnglish
Type學位論文 ; thesis
Format80

Page generated in 0.0016 seconds