碩士 / 國立高雄海洋科技大學 / 微電子工程研究所 / 100 / Recent years, piezoelectric material is very important from the viewpoint of calibration of acoustic device. Piezoelectric material has been widely used for underwater guidance or accurate distance measurement. In
most cases, piezoelectric hydrophones are used for such measurements. The sensor sensitivity of a focused acoustic device is determined using this hydrophone. A finite-element analysis (FEA) was calculated to evaluate the resonant frequency of the diaphragm transducer. ZnO and PZT thin films are produced through sputtering and Sol-Gel, respectively. In this experiment, the phase changes are observed using by X-ray diffraction (XRD). Surface morphology of the thin film examination is performed using a scanning electron microscope (SEM). The elemental compositions of thin films are assessed using Energy dispersive spectroscopy (EDS).
To create a better receiver in the hydrophone, the thickness of the ZnO and PZT were modeled and simulated using other people’s studies in an attempt to increase its capabilities. Because the thin film hydrophone is perfect for underwater sonar, the Comsol Multitphysics modeling and simulation software was used to find the thickness and size as well as analyze the relationship it has with frequency. The hydrophone was covered with para-xylene and put under more underwater tests to find where it had the best characteristics.
| Identifer | oai:union.ndltd.org:TW/100NKIMT428011 |
| Date | January 2012 |
| Creators | Hou,Kuochang, 侯國章 |
| Contributors | Chang,Shunhsyung, 張順雄 |
| Source Sets | National Digital Library of Theses and Dissertations in Taiwan |
| Language | zh-TW |
| Detected Language | English |
| Type | 學位論文 ; thesis |
| Format | 66 |
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