碩士 / 國立高雄海洋科技大學 / 輪機工程研究所 / 102 / Abstract
This study applies DC magnetron sputtering equipment sputter TiN with TiMn of thin films to explore the feasibility of its electrocatalytic properties in the hull anti-fouling. Learned from relevant research materials TiN with TiMn can serve as a good electric catalytic oxidation pyrolysis of water pollutants potential materials, TiN film has quite high adhesion hardness, low resistance, does not release toxic substances, corrosion resistant properties. The TiMn film is not easily oxidized, electrochemical high stability. The study was therefore to TiN with TiMn of its electrocatalytic properties for potential application to biofouling prevention. Its experimental principle applied in electrical catalyst for micro electric current can release the hydrogen and oxygen free radical (OH) by oxidation technology, match in the outer hull application, distribution installed in the bulkhead plate and shell are eroded biological adhesion area, use the anode exchange is greatly make electric catalytic electrodes, kill microbes to trace current food source inhibit microbial adhesion, and physical reaction, decomposition of microbial cells procedural steps, achieve pollution prevention and control technology. Sputtering TiN film on different substrate (stainless steel and carbon steel plate, titanium plate) in different time 1.5h and 3h batch process parameters, under different substrate process going into the same gas parameters 15sccm (N2) and 30sccm (Ar), sputtering press- ure keep around 4.5 x10-3Torr. Sputtering TiMn titanium plate (substrate) going into parameters of different gases (O2) and (Ar), 0.5sccm (O2) and the 19.5sccm (Ar). 1sccm (O2) and 19sccm (Ar) sputtering pressure is maintained at 3.8x10-3Torr, time 2h. Specimens will be completed by the X-ray diffraction analyzer (XRD) analysis of its crystal structure, Scanning electron microscope (SEM) analysis of thin film surface morphology and microstructure, Four point probe and other electrical and physical analysis.After electrochemical water test, the electrocatalytic properties (its) according to the preparation of oxygen content about 0.5sccm TiMn film, Producing bubbles voltage is about 1.2V vs. SCE (reference electrode) and in 1.2V vs. SCE, this film can produce catalytic oxidation of Hydroxyl radical(OH). TiMn film oxygen 1sccm, producing bubbles voltage of about 1.3V vs. SCE, also in 1.2V vs. SCE when produce Hydroxyl radical(OH). Adding increased plate preparation of thin films, oxygen 0.5sccm, increases bubbles voltage of 1.7V vs. SCE, hydroxyl radicals is about 1.7V vs. SCE. TiN film at different substrate in different times process parameters, (1.5h) stainless steel and low carbon steel bubbles voltage 0.5V ~ 1Vvs.SCE. (3h) titanium production bubble voltage of about 1.7Vvs.SCE, and in 1.6 V vs. SCE produce Hydroxyl radical(OH).
Keywords: Hydroxyl radical, Electrocatalytic properties
| Identifer | oai:union.ndltd.org:TW/102NKIM0484007 |
| Date | January 2014 |
| Creators | Jheng-Wun Jhang, 張正文 |
| Contributors | Kee-Rong Wu, 吳基榮 |
| Source Sets | National Digital Library of Theses and Dissertations in Taiwan |
| Language | zh-TW |
| Detected Language | English |
| Type | 學位論文 ; thesis |
| Format | 81 |
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