A Study of New Plasma Induced Damage Recorder and Charge Splitting Characteristic by Advanced FinFET Logic CMOS Technology / 應用於先進鰭式電晶體邏輯製程之新型電漿充電損害記錄元件暨電荷分離記錄特性之研究

碩士 / 國立清華大學 / 電子工程研究所 / 105 / abstract hide

Identiferoai:union.ndltd.org:TW/105NTHU5428038
Date January 2017
CreatorsHsieh, Ting-Huan, 謝定寰
ContributorsKing, Ya-Chin, 金雅琴
Source SetsNational Digital Library of Theses and Dissertations in Taiwan
Languagezh-TW
Detected LanguageEnglish
Type學位論文 ; thesis
Format83

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