碩士 / 國立臺灣海洋大學 / 電機工程學系 / 105 / In this paper, the ultrasonic sensor is fabricated by semiconductor process technology, and the lead zirconate titanate Pb(Zr0.52Ti0.48)O3 was used as the acoustic wave sensing layer. The focus of the research is to install the self-made ultrasonic sensor and 64 array ultrasonic transmitter in the Remotely Operated Vehicle (ROV) for underwater image acquisition, and the ultrasonic sensing device changes the sensing frequency by the structural adjustment of the piezoelectric layer and the upper and lower electrode layers, enhance the sonic wave receive intensity and image resolution.
In this paper, the ultrasonic sensing device is made up of 48 × 70 single device in parallel, after ultrasonic sensor device is prepared, underwater measurements and electrical measurements will be performed. The underwater measurements included sonic wave receiving intensity measurement, device sensing sensitivity measurement, device sonic field measurement and the measurement of device installed in the Remotely Operated Vehicle for underwater image acquisition. The electrical measurements included resonant frequency and anti-resonant frequency measurement, electromechanical coupling coefficient measurement, equivalent circuit measurement, dielectric constant measurement and hysteresis curve measurement.
In this paper, the ultrasonic sensing device at the frequency of 600kHz, the device sensing sensitivity is about -212.17dBreV/μPa. The ultrasonic sensing device at the frequency of 7MHz has the highest device sensing sensitivity, which is about -170.86dBreV/μPa. In the measurement of device installed in the Remotely Operated Vehicle for underwater image acquisition, underwater object distance of 20 cm image is better.
| Identifer | oai:union.ndltd.org:TW/105NTOU5442008 |
| Date | January 2017 |
| Creators | Liao, Shih-Chun, 廖士竣 |
| Contributors | Chang, Chung-Cheng, 張忠誠 |
| Source Sets | National Digital Library of Theses and Dissertations in Taiwan |
| Language | zh-TW |
| Detected Language | English |
| Type | 學位論文 ; thesis |
| Format | 57 |
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