Design and Analysis of Acceleration curve of Precise Single-Deck Dual-Axes Air-Bearing Motion Stage / 精密單層雙軸氣浮運動平台之加速度曲線規劃分析

碩士 / 國立臺灣大學 / 機械工程學研究所 / 106 / This thesis addresses the fundamental problem of design of acceleration curve so that it can deal with the infinite Jerk when system starts moving. This structure is based on giving the system a sudden speed command that requires a great deal of acceleration, and a sudden acceleration produces an infinite jerk. According to Newton''s second law, F=ma, this large acceleration can also cause a great load on the system. Therefore, the design of the acceleration curve is to make a continuous curve, not only let motion pro-cess maintain a smooth speed movement, but also make the Jerk a continuous finite val-ue, and reduce the load on the system.
The system is a dual-axis air-bearing motion stage system consists of four perma-nent magnet brushless linear motors. For simplicity, in this thesis the complex system is decoupled to three(X, Y, Theta-axis) single input single output(SISO) systems. Because of the system is unstable, a closed-loop system identification method is used to identify the mathematical model. Finally, the transfer function of three(axis) single input, single output(SISO) system is obtained by using the embedded function, “Parameter estima-tion” under Simulink environment with time domain method.
In control structure, mainly designing the continuous acceleration and deceleration curve first, and using the integral to get the position of time function. After obtaining the tracking curve of the position command which is position of time function, using PID controller and series control method to achieve the control target. Compared with the “Access and Positioning control” structure proposed by the lab team, the “Access and Positioning control” structure simultaneously inputs the reference position and ref-erence velocity, and the complicated operation makes the system’s H-infinite norm lim-ited to a range. Finally, using the augmented-Luenberger observer to compensate for the internal and external low-frequency disturbance. Design of acceleration curve structure uses simpler PID controller. If at the sacrifice of a short time to reach the location point, design of acceleration curve structure has a higher positioning accuracy and a lower maximum overshoot than “Access and Positioning control” structure. In angle control, the design of acceleration curve structure overall performance is better than “Access and Positioning control” structure. If at the sacrifice of maximum overshoot, design of ac-celeration curve structure has a higher positioning accuracy and a shorter time to reach the location point than “Access and Positioning control” structure. In angle control, the overall performance of design of acceleration curve structure is better than “Access and Positioning control” structure, too.

Identiferoai:union.ndltd.org:TW/106NTU05489152
Date January 2018
CreatorsFan-Chun Kuo, 郭凡鈞
ContributorsJia-Yush Yen, 顏家鈺
Source SetsNational Digital Library of Theses and Dissertations in Taiwan
Languagezh-TW
Detected LanguageEnglish
Type學位論文 ; thesis
Format114

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