Suppressed Gate Leakage Current and Enhanced Gate Dielectric Reliability in FinFET / 鰭式電晶體之抑制閘極漏電流與提升閘極介電層可靠度研究

碩士 / 國立清華大學 / 工程與系統科學系 / 107

Identiferoai:union.ndltd.org:TW/107NTHU5593007
Date January 2018
CreatorsChen, Huang-Jen, 陳皇任
ContributorsChangLiao, Kuei-Shu, 張廖貴術
Source SetsNational Digital Library of Theses and Dissertations in Taiwan
Languagezh-TW
Detected LanguageEnglish
Type學位論文 ; thesis
Format80

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