The Device Performance and Reliability Study on N-type Multi-Fin FinFET Structure by Adopting Metal Gate Multi Work Function Thickness Engineering / 功函數金屬厚度調變對 N 型多重鰭數鰭式場效電晶 體之元件特性和可靠度研究

碩士 / 國立高雄大學 / 電機工程學系碩博士班 / 107

Identiferoai:union.ndltd.org:TW/107NUK00442020
Date January 2019
CreatorsLIN,WEN-CHIN, 林文欽
ContributorsYEH,WEN-KUAN, 葉文冠
Source SetsNational Digital Library of Theses and Dissertations in Taiwan
Languagezh-TW
Detected LanguageEnglish
Type學位論文 ; thesis
Format100

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